diff --git a/drivers/dma/dma_andes_atcdmac300.c b/drivers/dma/dma_andes_atcdmac300.c
index 8132dd1749c0..2f817242fbe3 100644
--- a/drivers/dma/dma_andes_atcdmac300.c
+++ b/drivers/dma/dma_andes_atcdmac300.c
@@ -71,18 +71,18 @@ LOG_MODULE_REGISTER(dma_andes_atcdmac300);
 #define DMA_CH_CTRL_SBINF_MASK		BIT(31)
 #define DMA_CH_CTRL_DBINF_MASK		BIT(30)
 #define DMA_CH_CTRL_PRIORITY_HIGH	BIT(29)
-#define DMA_CH_CTRL_SBSIZE_MASK		BIT(24)
+#define DMA_CH_CTRL_SBSIZE_MASK		GENMASK(27, 24)
 #define DMA_CH_CTRL_SBSIZE(n)		FIELD_PREP(DMA_CH_CTRL_SBSIZE_MASK, (n))
 #define DMA_CH_CTRL_SWIDTH_MASK		GENMASK(23, 21)
 #define DMA_CH_CTRL_SWIDTH(n)		FIELD_PREP(DMA_CH_CTRL_SWIDTH_MASK, (n))
 #define DMA_CH_CTRL_DWIDTH_MASK		GENMASK(20, 18)
 #define DMA_CH_CTRL_DWIDTH(n)		FIELD_PREP(DMA_CH_CTRL_DWIDTH_MASK, (n))
 #define DMA_CH_CTRL_SMODE_HANDSHAKE	BIT(17)
-#define DMA_CH_CTRL_DMODE_HANDSHAKE	BIT(17)
+#define DMA_CH_CTRL_DMODE_HANDSHAKE	BIT(16)
 #define DMA_CH_CTRL_SRCADDRCTRL_MASK	GENMASK(15, 14)
-#define DMA_CH_CTRL_SRCADDR_INC		FIELD_PREP(DMA_CH_CTRL_DWIDTH_MASK, (0))
-#define DMA_CH_CTRL_SRCADDR_DEC		FIELD_PREP(DMA_CH_CTRL_DWIDTH_MASK, (1))
-#define DMA_CH_CTRL_SRCADDR_FIX		FIELD_PREP(DMA_CH_CTRL_DWIDTH_MASK, (2))
+#define DMA_CH_CTRL_SRCADDR_INC		FIELD_PREP(DMA_CH_CTRL_SRCADDRCTRL_MASK, (0))
+#define DMA_CH_CTRL_SRCADDR_DEC		FIELD_PREP(DMA_CH_CTRL_SRCADDRCTRL_MASK, (1))
+#define DMA_CH_CTRL_SRCADDR_FIX		FIELD_PREP(DMA_CH_CTRL_SRCADDRCTRL_MASK, (2))
 #define DMA_CH_CTRL_DSTADDRCTRL_MASK	GENMASK(13, 12)
 #define DMA_CH_CTRL_DSTADDR_INC		FIELD_PREP(DMA_CH_CTRL_DSTADDRCTRL_MASK, (0))
 #define DMA_CH_CTRL_DSTADDR_DEC		FIELD_PREP(DMA_CH_CTRL_DSTADDRCTRL_MASK, (1))