microtech

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Analytical & numerical modeling of resonant Silicon Microsensors, invited paper Sensors & Materials

Mikromechanik, MEMS, Mikrosystemtechnik, MST, Halbleiter, Semiconductor, microsystems

electronics mst sensors chips actuator cleanroom silicon mems electronics-engineering micromechanics microtech reinraum mems-sensors microsystems silizium mikromechanik halbleiter mikrosystem

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