Update XPS_device.md

plasma-mds · Feb 7, 2024 · 22373a8 · 22373a8
1 parent 72e6e12
commit 22373a8
Showing 1 changed file with 22 additions and 8 deletions.
diff --git a/dev/diagnostics/spectroscopy/XPS/XPS_device.md b/dev/diagnostics/spectroscopy/XPS/XPS_device.md
@@ -5,7 +5,11 @@
 | 3 | developedBy            | Developer              |   | Name of the company                                       | string  | 1     |               |
 | 4 | AngleSourceValue       | Angle between source and analyser |  ° | Angle between source and analyser           | number  | 1     |               |
 | 5 | Aperture               | Aperture of the device |   | Aperture of the device                                    | string  | 1     |               | 
-| 6 | ReferenceScale         | Reference scale        |   | By giving position and FWHM of a ref material at a reference PE | string | 1|               |
+| 6 | ReferenceScalePE      | Reference scale PE |  eV | By giving position and FWHM of a ref material at a reference PE          | number  | 1     |               |
+| 6.1 | ReferenceScaleAu      | Reference scale Au  |  eV | By giving position and FWHM of a ref material at a reference Au          | number  | 1     |               |
+| 6.2 | ReferenceScaleAg       | Reference scale Ag  |  eV | By giving position and FWHM of a ref material at a reference Ag           | number  | 1     |               |
+| 6.3 | ReferenceScaleCu      | Reference scale Cu  |  eV | By giving position and FWHM of a ref material at a reference Cu           | number  | 1     |               |
+| 6.4 | ReferenceScaleC       | Reference scale C  |  Ev | By giving position and FWHM of a ref material at a reference C          | number  | 1     |               |
 | 7 | Detector               | Detector type          |   | Type and name of the detector                             | string  | 1     |               |
 | 8 | MaintenanceDate        | Last maintenance date  |   | The date date of maintenance                              | string  | 1     |               |
 | 9 | IncidentAngle          | Incident Angle         | °  | Angle to surface normal                               | number  | 1     |               |
@@ -14,10 +18,20 @@
 | 12 | EmissionCurrent|Emission Current|mA| Emission current of the source|number|1||
 |13|PhotonFlux|Photon flux||Photon flux|string|1||
 | 14 | Monochromatic          | Monochromatized        |   | monochromatization (yes/no)                               | boolean | 1     |            |
-|15 | Resolution             | Resolution of the device |  | Resolution for device                                   | number  | 1     |               |
-| 16 | AngleSputter           | Angle Sputtering       |  ° | Angle between sputter beam and surface normal          | number  | 1     |               |
-| 17 | DwellTimeValue         | Dwell time             |  s | dwell time                                             | number  | 1     |               |
-| 18 | TakeOff                | Take off angle         |  ° | with respect to surface normal                         | number  | 1     |               |
-| 19 | AnalyserMode           | Analyser mode          |   | Fixed analyser transmission/ Fixed pass energy (FAT) or constant retardation ratio (CRR) |string |1   |          |
-| 20 | DeviceEquipment        | Device equipment       |   | Device equipment (further sources)                        | string  | 0-1    |               |
-| 21 | CoolHeat               | Cooling or heating     |   | Is a cooling or heating system installed                  | string | 0-1    |               |
+| 15|AnodeVoltageValue|Anode voltage|kV|Voltage at the anode|number|true|15 keV|
+|16 | Resolution             | Resolution of the device |  | Resolution for device                                   | number  | 1     |               |
+| 17 | AngleSputter           | Angle Sputtering       |  ° | Angle between sputter beam and surface normal          | number  | 1     |               |
+| 18 | DwellTimeValue         | Dwell time             |  s | dwell time                                             | number  | 1     |               |
+| 19 | TakeOff                | Take off angle         |  ° | with respect to surface normal                         | number  | 1     |               |
+| 20 | AnalyserMode           | Analyser mode          |   | Fixed analyser transmission/ Fixed pass energy (FAT) or constant retardation ratio (CRR) |string |1   |          |
+| 21 | DeviceEquipment        | Device equipment       |   | Device equipment (further sources)                        | string  | 0-1    |               |
+| 22 | CoolHeat               | Cooling or heating     |   | Is a cooling or heating system installed                  | string | 0-1    |               |
+|23|NeutralizeType|Neutralization||Neutralization information during measurement|string|1|
+|23.1|NeutralizeEnergy|Energy of neutralization|W|Energy of neutralization|number|1|
+|24.2|NeutralizeCurrent|Current neutralize|mA|Neutralization current|number|1|
+|26|SputterIonName|Gas name||Name of the gas used for sputtering|string|1|Ar, He|
+|26.1|Cluster|Cluster/Ion||Cluster or ion sputtering|string|1|
+|26.2|SputterSpot|Spot size of sputtering|µm|Spot size of the sputtering |number|1|
+|26.3|SputterFluences|Sputtering fluences||Fluences during sputtering|number|1|
+|30|TransmissionFunctionFile|Transmission function file||Transmission function file name|string|1|
+|30.1|TransmissionFunctionDate|Transmission function date||Date of the measured transmission function|string|1|